-
Ready for use with larger LCD substrates.
-
Realized a flow rate approximately 2 times*1 that of conventional ultra-high flow rate filters.
-
Best suited for cleaning Gen 8 through Gen 10 large LCD substrates.
- *1 UXL type
The lineup includes 2 types of cartridges of different filtering areas (UXL type / SXL type).
The cartridge realizes an extraordinarily high flow rate equivalent to approximately 2 times the ultra-high flow rate of the PSE cartridge XL type. A flow rate of 300 L/min.*2 is ensured with a pore size of 0.2 µm. (At ΔP = 0.03 MPa)
The proprietary inner dense layer of the PSE membrane that features a well-defined pore size distribution ensures reliable retention of fine particles.
The cartridge fits housings that are ready for use with the filer O-ring size AS568-334 type. It can be used at a still higher flow rate by combining it with a housing manufactured by us.
Robustness has been realized by means of high strength polysulfone membrane and a newly designed main body.
- *2 UXL type
The cartridge employs a favorably received membrane of proprietary asymmetrical structure (PSE membrane).
It demonstrates excellent performance in the following applications that require high fine particle retention performance, a high flow rate and long service life.
-
Filtration of cleaning water used by wet process equipment to make large substrates for LCD
|
Item |
Unit |
Performance |
Remarks |
||||
|---|---|---|---|---|---|---|---|
|
Pore size |
µm |
0.1 |
0.2 |
0.45 |
1.2 |
||
|
Size |
Length |
mm |
273 |
|
|||
|
Outer diameter |
mm |
130 |
|
||||
|
Maximum differential pressure |
25℃ |
MPa |
0.34 (Positive pressure) |
|
|||
|
PH area to be used |
|
1 -14 |
*3 |
||||
- *3 In the case of using the cartridge for chemical fluid filtration, prior evaluation should be carried out under the planned conditions of use.
|
Part name |
Material |
|---|---|
|
Membrane filter |
Polysulfone (Asymmetric membrane) |
|
Support material |
Polypropylene |
|
Case |
Polypropylene |
|
O-ring |
EPDM (standard) |
O-ring size: JIS-P65 (AS568-334 or equivalent)
The following 2 types of housings allow the extraordinarily high flow rate filters to fully demonstrate their performance.
- FPSUX TE1 (made of polypropylene)
- FS6LJM 1-1 50 FET 1 (made of stainless steel)
- * For details of the methods of use, refer to the instruction manual that comes with the product.
- * The product may be built to order, depending on the shape and/or size. For details, contact your sales agent.
- * Specifications are subject to change for improvement purposes without prior notice.
