Overview
Ready for use under design rules responding to miniaturization.
The particle-removing grade for a single-pass operation stands at 0.05 µm.
The flow rate is decreased by only 15% as compared with the currently produced 0.1µm cartridges.
The cartridge is of the same size as earlier cartridges (diameter: 70mm), so the housing does not need to be replaced.
Features
Excellent retention performance
The inner dense layer peculiar to the PSE membrane ensures that even particles of 0.05 µm are reliably retained.
High flow rate
The flow rate is decreased by only around 15% as compared with the conventional 0.1 µm single (1-stage) cartridges.
Long useful life
The structure peculiar to the PSE membrane offers a long useful life.
Main applications
Since the cartridge employs the PSE membrane that has been received a favorable reputation, it is best suited for the following lines that require the removal of ultra-fine particles.
-
Filtration of purified water for cleaning equipment in the 300 mm wafer manufacturing process
-
Filtration of chemicals for cleaning equipment in the 300 mm wafer manufacturing process
-
Filtration of plating fluids, developers, etc.
Specifications
Table of Performance Characteristics
|
Item |
Unit |
Performance |
Remarks |
|
|---|---|---|---|---|
|
Pore size |
µm |
0.05 |
||
|
Size |
Length |
mm |
264 |
*1 |
|
Outer diameter |
mm |
70 |
||
|
Maximum differential pressure |
25℃ |
MPa |
0.54 (Positive pressure) |
|
|
25℃ |
MPa |
0.34 (Negative pressure) |
||
|
Heat resistance |
℃ |
90℃ |
*2 |
|
|
Applicable pH range |
1 - 14 |
*3 |
||
- *1 Please contact us if you need detailed dimensions.
- *2 Continuous operating temperature
- *3 In the case of using the cartridge for chemical fluid filtration, prior evaluation should be carried out under the planned conditions of use.
Material
|
Part name |
Material |
|---|---|
|
Guard |
Polypropylene |
|
Center core |
Polypropylene |
|
Support |
Polypropylene |
|
Membrane filter |
Polysulfone (Asymmetric membrane) |
|
O-ring |
EPDM (Silicon, Viton) |
|
|
Pore size |
||
|---|---|---|---|
|
M type |
MP type |
||
|
Package unit |
1 |
PSECM05SPPW1 |
PSECMP05SPPW1 |
|
12 |
PSECM05SPPW12 |
PSECMP05SPPW12 |
|
