Overview
The capsule uses a PSE membrane that has been received favorably. It is small in size and delivers a high flow rate and high precision.
The flow rate equivalent to that of conventional single (1-stage) products of other companies is realized with a half (1/2 stage) product.
The proprietary inner dense layer of the PSE membrane ensures reliable retention of fine particles.
Main applications
-
Filtration of purified water used by single-wafer wet cleaning equipment
-
Filtration of chemicals used by single-wafer wet cleaning equipment
-
Final rinsing water for developers
Specifications
Table of Performance Characteristics
|
Item |
Unit |
Performance |
Remarks |
||||||
|---|---|---|---|---|---|---|---|---|---|
|
Pore size |
µm |
0.1 |
0.2 |
0.45 |
0.1 |
0.2 |
0.45 |
|
|
|
Nominal size |
|
Q |
H |
|
|||||
|
Size |
Length |
mm |
152 |
210 |
*1 |
||||
|
Outer diameter |
mm |
93.5 |
|
||||||
|
Maximum differential pressure |
25℃ |
MPa |
0.54 (Positive pressure) |
|
|||||
|
Heat resistance |
MAX℃ |
40℃ |
*2 |
||||||
|
PH area to be used |
|
1 - 14 |
*3 |
||||||
- *1 Refer to “Size and nozzle diameter” below.
- *2 Continuous operating temperature
- *3 In the case of using the cartridge for chemical fluid filtration, prior evaluation should be carried out under the planned conditions of use.
Material
|
Part name |
Material |
|---|---|
|
Housing |
Polypropylene |
|
Element guard |
Polypropylene |
|
Center core |
Polypropylene |
|
Support |
Polypropylene |
|
Membrane filter |
Polysulfone (Asymmetric membrane) |
Initial flow rate and initial pressure loss
Abbreviated product name
|
|
Quarter (1/4 size) |
Half (1/2 size) |
|---|---|---|
|
0.1µm |
PSED10QW1 |
PSED10HW1 |
|
0.2µm |
PSED20QW1 |
PSED20HW1 |
|
0.45µm |
PSED45QW1 |
PSED45HW1 |
|
PSED Q |
PSED H |
|
|---|---|---|
|
A |
93.5 |
|
|
B |
92 |
|
|
C |
87 |
|
|
D |
35 |
|
|
E |
35 |
|
|
F |
140 |
196 |
|
G |
86.7 |
|
|
L |
152 |
210 |
|
N-① |
R1/2 |
R3/4 |
|
N-② |
R1/2 |
R3/4 |
|
N-③ |
With R1/4 cap |
|
|
N-④ |
With R1/4 cap |
|
Unit: mm
- * For details of the methods of use, refer to the instruction manual that comes with the product.
- * The product may be built to order, depending on the shape and/or size. For details, contact your sales agent.
- * Specifications are subject to change for improvement purposes without prior notice.
