Features & Benefits
Wide array of high resolution imaging systems for 193 nm exposure including positive dry and immersion imaging and negative tone development (NTD)
- High throughput
- Superior resolution
- Wide process windows
- Low defect levels
- Vertical profiles
Product Summary
- GAR series
The GAR series of products are suited to work with a wide array of applications requiring 193nm dry exposure - FAiRS series for PTD
The FAiRS series of products are suited to work with a wide array of applications requiring 193nm immersion exposure and positive tone development - FAiRS series for NTD
The FAiRS series of products are suited to work with a wide array of applications requiring 193nm immersion exposure and negative tone development
