ArF (193nm) - Applications

KrF (248nm)

Positive tone KrF photoresists covering a broad range of applications

i-Line, g-Line and Broadband

Extensive series of mid-uv sensitive photoresists for critical to non-critical applications encompassing sub-0.30µm to >1.0µm resolution.

Negative (Polyisoprene-based)

Multiple series of negative tone, polyisoprene-based resist systems

e-Beam

Positive and negative tone resist series for a wide array of e-beam imaging applications