Supporting chemistry for low K dielectrics
We focus on these issues without interfering with, or restricting, the customer’s process.
Advanced Low K
Advanced dielectrics for 45/22 nm node and below
Dielectric and Dopant Sources
High purity precursors supported by state of the art analytical testing and production
Others
Chlorine sources, adhesion promoters, etchants, cleaners, reducers
Distribution Equipment
Chemical delivery systems designed with an open architecture compatible to many chemistries
Temperature Controller
Precision temperature control of your precursor with the ease of front loading
