The TC 2000 family offers an accurate control of your precursor temperature during processing, guaranteeing a steady vapor pressure.
- Front loading
- Pre-equipped for automatic refilling
- Compatible with most industry standard ampoules
- Supports 1.5L quartz container sizes
- Flexible designs
Product Summary
TC2000™ - Temperature controller
- Three temperature ranges
- Cool/Heat 15°C-40°C
- Heat 35°C-70°C
- Ultra heat 55°C-90°C
- Three hardware configurations
- Stand alone
- Remote electronics
- Rack Mounted
