- Efficient particle removal
- Excellent organic cleanability
- Outstanding corrosion protection for sensitive metal features
- Attractive cost of ownership – concentrated cleaners provide lower cost at point-of-use
Available Copper Post CMP Cleaner:
- CLEAN-100
- Removes particles and metallic impurities
- Eliminates organic residues
- Acidic chemistry
Available Tungsten Post CMP Cleaner:
- WCP-200
- Removes particles without damaging metallic films
- Inhibits tungsten corrosion
- Neutral solution
