- Edge Bead Removal (EBR)
- Pre-wet
- Back side rinse
- Cup rinse.
- Nozzle clean
France
Solvents
Broad range of specialty solvent blends for resist Edge Bead Removal (EBR), rework, rinse & pre-wet applications. Ultra-pure solvents for advanced lithography pre-wet applications
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A wide range of wet chemistries for the lithographic process
