i-Line, g-Line and Broadband - Overview

Extensive series of mid-uv sensitive photoresists for critical to non-critical applications encompassing sub-0.30µm to >1.0µm resolution on varied substrates over a large range of resist thickness.

• Advanced i-Line Resists for Non-reflective Substrates Resist families designed for demanding critical CD (<350 nm) printing on non-reflective substrates :
  • OiR 620 series
  • OiR 674 series
• Advanced i-Line Resists for Reflective Substrates Resist series offering fast photospeed options for advanced resolution (>350 nm CD) patterning on reflective substrates :
  • OiR 674 series
  • GiR 1102 series
• Multi-purpose High Resolution i-Line Resists Resist series offering fastest photospeed options for high throughput, high resolution (>500 nm CD) and robust patterning :
  • GIR 2700 Series
  • OiR 305 series
  • OiR 906 series
  • OiR 907 series
• Multi-purpose Cross-over g- and i-Line Resists Resist series offering robust patterning for g-line, i-line and broadband (>800 nm CD) :
  • HiPR 6500 series
  • HPR 512
• Dyed Resists for Highly Reflective Substrates Resist series offering non-bleaching, high optical densities for CD and notching control on highly reflective substrates :
  • OiR 906HD
  • OiR 305HC
  • HiPR 6517GH
• i-Line Resists for Thicker Applications Resist series for thicker film patterning needs ranging from 3 to 11 µm film thickness :
  • FHi-560EP Series
  • FHi-570
  • OiR 305
  • OiR 908