High Purity Process Chemicals

Welcome to FUJFILM Electronic Process Chemicals—formerly Entegris Electronic Chemicals. Fujifilm acquired Entegris Electronic Chemicals on October 2, 2023.

Our technology leadership and close customer collaboration ensure excellent product quality and consistent production of advanced electronic chemicals used to enable the high-performing devices of today and the next generation of technology.

Industries

Semiconductor manufacturing
Silicon wafers
Photomasks
Photovoltaic (solar cell panel) manufacturing
Flat panel display manufacturing
Hard disk drives (HDD)

Products

We offer a broad line of semiconductor-grade wet chemicals with products ranging from single digit parts-per-trillion (ppt) to parts-per-billion (ppb) cation levels depending on your needs.

Our high-purity electronic chemical portfolio includes acids and bases, solvents and solvent blends, and unique bespoke mixtures. These products are supplied in a variety of concentrations and shipping options, from bottles and drums to totes and ISO tankers.

Search Electronic Chemicals Safety Data Sheets

Product Portfolio

Acids

Acetic
Hydrochloric
Hydrofluoric
Hydrogen peroxide
Nitric
Nitric acid fuming
Phosphoric

Bases

Ammonium hydroxide
Ammonium fluoride
Potassium hydroxide
Sodium hydroxide

Solvents

Acetone
DMSO
Ethyl lactate
Hexamethyldisilazane
Isopropanol
Methanol
N-Butyl acetate
N-methylpyrrolidone
PGMEA

Chemical Type

Etchants

Buffered oxide etchants available in ratios from 5:1 to 500:1
Unique surfactants for BOE range
Mixed acid etchants for many unique processes including spin tool silicon etching
Wide range of metal etchants including aluminum, copper, chromium, gold, nickel, platinum, tantalum, and titanium
Includes mixtures for metal alloys and ITO materials

Post Etch Removal

For removal of both positive and negative resists including post-etch polymers
Low etch rates for a variety of materials
Effective organic residue removers
Stable formulated product
Proprietary Nano-Strip® and GenSolve™ photo-resist and post-etch residue removal

Solvent Blends

Cleaning in semiconductor and related high-purity processes
Various etch-polishing processes
Ultra-low-residue vapor drying
Adhesion promoters for photoresists
Positive and negative photoresist stripping agents
Flat panel display manufacturing
Photoresist edge-bead-remover agents
High-purity intermediates for photoresist, spin-on-glass, low-k dielectric materials and anti-reflective coatings
Carriers for photoresist, abrasives, solvents, and lubricants
Coolants, wetting agents, and thickeners

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