- Full access from the front
- Slide out scales
- Separated electronics
- Easy access from top opening cabinets
- Chemical verification
- Spill detection
- Step by step software
- Automated purge
- Password protected operation mode
- Open Architecture, no process or container patents
- Will work with any supplier's containers
- Supports 1.2L to 200L container sizes
- Used for logic, DRAM, ASIC, DSPs, etc.
- In use with all major OEM tools
- BKM at numerous major end users
- World Wide presence
- Genstream® 3000 advanced comprehensive chemical delivery systems
Netherlands
Distribution Equipment - Features & Benefits
Chemical delivery systems designed with an open architecture compatible to many chemistries
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Cost saving solutions for the semiconductor industry -
Advanced Low K
Advanced dielectrics for 45/22 nm node and below
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Gap Fill and Recovery
Supporting chemistry for low K dielectrics
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Dielectric and Dopant Sources
High purity precursors supported by state of the art analytical testing and production
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Others
Chlorine sources, adhesion promoters, etchants, cleaners, reducers
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Temperature Controller
Precision temperature control of your precursor with the ease of front loading
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