Fujifilm’s Genstream™ high purity specialty chemical delivery system was specifically designed to be compatible with semiconductor chemicals, and to fit into today’s advanced fabs.
Our Genstream™ was carefully designed to be easy to use and maintain, and to provide value to your process. Being fully modular, our Genstream™ system solution can be uniquely tailored to address your specific process needs with minimum capital investment. To request a quote or to order a Genstream™, please go to the Support tab and complete an inquiry form or call our team at +1-800-553-6546.
Features & Benefits
- Full access from the front
- Slide out scales
- Separated electronics
- Easy access from top opening cabinets
- Chemical verification
- Spill detection
- Step by step software
- Automated purge
- Password protected operation mode
- Open Architecture, no process or container patents
- Will work with any supplier's containers
- Supports 1.2L to 200L container sizes
- Used for logic, DRAM, ASIC, DSPs, etc.
- In use with all major OEM tools
- BKM at numerous major end users
- World Wide presence
- Genstream™ 3000 advanced comprehensive chemical delivery systems
- * "Genstream™ " is a trademark of FUJIFILM CORPORATION, registered in the United States and other countries and regions.
