Product Lineup
- FEP series and XFP series
The FEP series and XFP series of products are suited to work with a wide array of applications requiring positive tone imaging with e-beam exposure. - FEN series and XFN series
The FEN series and XFN series of products are suited to work with a wide array of applications requiring negative tone imaging with e-beam exposure.
Features & Benefits
- Superior resolution
- Wide process windows
