Product Lineup
- GAR Series
The products in the GAR series are suitable for a variety of applications that require 193nm dry exposure. - FAiRS Series for PTI (positive tone imaging)
The products in the FAiRS series are suitable for a variety of applications that require 193nm immersion exposure and positive tone imaging. - FAiRS Series for NTI (negative tone imaging)
The products in the FAiRS series are suitable for a variety of applications that require 193nm immersion exposure and negative tone imaging.
Features & Benefits
Wide array of high resolution imaging systems for 193 nm exposure including positive dry and immersion imaging and negative tone imaging (NTI)
- High throughput
- Superior resolution
- Wide process windows
- Low defect levels
- Vertical profiles
