Dielectric and Dopant Sources - Applications

Advanced Low K

Advanced dielectrics for 45/22 nm node and below

Gap Fill and Recovery

Supporting chemistry for low K dielectrics

Others

Chlorine sources, adhesion promoters, etchants, cleaners, reducers

Distribution Equipment

Chemical delivery systems designed with an open architecture compatible to many chemistries

Temperature Controller

Precision temperature control of your precursor with the ease of front loading