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KrF (248nm) - Overview

Positive tone KrF photoresists covering a broad range of applications

Product Lineup

GKR series offers a wide lineup of products from high-thickness films to high-resolution products to meet the various requirements of customers.

  • GKR-46xx/32xx series (for implant) 
  • GKR-53xx series (for C/H)
  • GKR-63xx series (for L/S)