HF-12M Series - Case Studies

A manufacturer of 3D measurement equipment: Company D

The optical axis shift causes an error in inspections. Why does a manufacturer that requires high accuracy would opt for reliability?

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The Company D, a manufacturer that delivers 3D measurement equipment to various types of businesses, performs inspections and precise calibration of all lenses used for the equipment before providing them to users. However, the optical axis of lens may be shifted by shock or vibration after operation startup, thereby hindering accurate inspections. Therefore, selecting a lens with shock-resistant and anti-vibration functions after operation startup is a challenge.

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System integrator S

A lens is adopted for a high-precision semiconductor inspection equipment.
What is the decisive factor in the selection of a semiconductor manufacturer?

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“We would like you to propose a lens that can be used assuredly for the new semiconductor inspection equipment that we are developing.” The semiconductor inspection equipment manufacturer said so, and consulted with the system integrator S. However, the company S could not determine a way to evaluate the quality and performance of lens suitable for high-precision semiconductor inspection in which an error even in units of micron is not permitted.

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System integrator M

The actual resolution performance of a lens cannot be learned by specification.
What is the key tool to recognize it clearly?

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The system integrator M was selecting a lens based on the catalog specifications in accordance with requirements of the company’s inspection vision system. However, they felt frustrated by not being able to constantly provide the best lens because lenses with the same specification by different manufactures varied greatly in the resolution performance.

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